TRY OUT REPORT
결 제
작성
검토
승인
　
　
　
차 종
　
일 자
　
품 명
　
설 비
　
품 번
　
담당자
　














설비 상태
터렛 및 이송부 관리 상태
척 및 JAW 관리 상태
에어 및 유압 상태
담 당 자
　
　
　
　
가공 조건
공 정 명
인써트 명
공구 수명
선삭 1차
1
프렌지 황삭
　
　
2
대외경, 기준경 황삭
　
　
3
단면, 기준경 정삭
　
　
4
내경 정삭
　
　
FEED
(㎜/REV)
　
　
1
0.3
　
　
2
0.3
　
　
3
0.45
　
　
4
0.38
　
　














품질
관련
　
　
　
　
　
　
상태
사진
　
　




　
　




　
　




　
　




　
　




　
　




　
　




　
　




　














문제점
　
　
　
　
　
　
방 안
　
　
　
　
　
　
　




　
　




　
　




　
　




　
　




　
　




　
　




　
　




　
　
　
　
　
　
　
　
　
　
　
　
　
　












　
결 과
　
　
　
　
　
　
　
　
　
　
　
　
　
　





　





　












　
　





　





　
　
　
　
　
　
　
　
　
　
　
　
　
　



 

 

 

www.kangha.net

Email : kangha@daum.net

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강하넷

PROCESS CAPABILITY ANALYSIS REPORT


　
　
　
　
　
　
　
　
　
　
DATE : 2022-02-22
PART NAME
　
　
　
PART NO
　
　
CHARACTERISTICS
　
LOT NO
　
　
PROCESS NAME
　
　
　
SAMPLE QUANTITY
　
　
INSPECTOR
　
　
　
GAGE NO
　
　
INPUT DATA








　
　
1
2
3
4
5
6
7
8
9
10
1
136.137
136.153
136.154
136.133
136.152
136.154
136.164
136.158
136.153
136.114
2
136.158
136.132
136.144
136.128
136.149
136.150
136.125
136.144
136.165
136.177
3
136.151
136.134
136.149
136.156
136.147
136.150
136.142
136.155
136.145
136.182
4
136.179
136.155
136.154
136.174
136.150
136.142
136.220
136.152
136.154
136.175
5
136.174
136.172
136.150
136.144
136.155
136.153
136.146
136.167
136.113
136.123
6
136.114
136.150
136.141
136.132
136.148
136.152
136.129
136.156
136.133
136.104
7
136.143
136.143
136.149
136.141
136.149
136.100
136.158
136.127
136.143
136.147
8
136.191
136.107
136.148
136.171
136.147
136.150
136.153
136.166
136.138
136.128
9
136.158
136.191
136.139
136.132
136.150
136.156
136.143
136.172
136.157
136.111
10
136.159
136.146
136.144
136.131
136.150
136.147
136.157
136.141
136.108
136.136
11
136.174
136.177
136.136
136.157
136.141
136.150
136.152
136.175
136.112
136.131
12
136.133
136.118
136.168
136.159
136.149
136.152
136.209
136.148
136.173
136.130
13
136.205
136.127
136.139
136.167
136.151
　
　
　
　
　



 

 

 

www.kangha.net

Email : kangha@daum.net

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 (강하넷)

www.kangha.net

 


대표사진 삭제

사진 설명을 입력하세요.

 




PART NAME
　
　
　
PART NO
　
　
CHARACTERISTICS
　
LOT NO
　
　
PROCESS NAME
　
　
　
SAMPLE QUANTITY
　
　
INSPECTOR
　
　
　
GADORS NO
　
　
1.INPUT DATA








　
　
1
2
3
4
5
6
7
8
9
10
1
63.881
63.869
63.880
63.887
63.875
63.886
63.883
63.874
63.892
63.888
2
63.879
63.874
63.881
63.877
63.878
63.884
63.878
63.886
63.891
63.887
3
63.884
63.883
63.882
63.881
63.880
63.877
63.885
63.884
63.890
63.880
4
63.879
63.887
63.884
63.881
63.883
63.877
63.877
63.876
63.890
63.880
5
63.878
63.883
63.878
63.887
63.876
63.875
63.880
63.880
63.882
63.886
6
63.883
63.878
63.887
63.886
63.877
63.880
63.875
63.886
63.880
63.879
7
63.892
63.876
63.880
63.883
63.886
63.875
63.877
63.883
63.881
63.882
8
63.868
63.886
63.877
63.878
63.877
63.885
63.882
63.876
63.873
63.886
9
63.884
63.876
63.883
63.878
63.877
63.879
63.880
63.882
63.880
63.883
10
63.871
63.870
63.882
63.882
63.878
63.885
63.881
63.879
63.868
63.883
11
63.880
63.892
63.872
63.884
63.874
63.878
63.880
63.885
63.887
63.881
12
63.878
63.889
63.886
63.884
63.881
63.879
63.886
63.875
63.885
63.885
13
63.884
63.890
63.882
63.887
63.878
　
　
　
　
　









 

 

 

www.kangha.net

Email : kangha@daum.net

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 (강하넷)

www.kangha.net

 

 

 

강하넷 진단 Report           ◎ : 매우 잘함
   ○ : 잘함
   △ : 보통
　 　                X : 현재 불가능
공정 별 현수준 대표 품목 대책
CVD ◎ (C) PLATE PERF COMMON 　
(C) PLATE, BLOCKER 　
(C) UPPER DOME 　
(C) CERMIC COVER 　
(C) COLLER MIN CONTACT 200 　
(C) SHIELD 　
(C) WAFER LIFT 　
(C) PUMPING PLATE 　
(C) PLATE WINDOW ITVSERT 　
(C) ISOLATOR CERAMIC PRO 200MM 　
(C) CERAMIC PUMPING INSERT TOP 　
(C) PRODUCER FACE PLATE 　
(C) CERAMIC PUMPING INSERT MID 　
(C) CERAMIC PUMPING INSERT BTM 　
(C) BLOCKER 　
(C) GAS BOX EXTENSION 　
(C) Manifold 　
(C)SHIELD(P-5000) 　
(C) CERAMIC FORK ASSY 　
○ (C) VRB SHIELD 8" 　
강하넷 진단 Report           ◎ : 매우 잘함
   ○ : 잘함
   △ : 보통
　 　                X : 현재 불가능
공정 별 현수준 대표 품목 대책
METAL ◎ (C) Altus Shower Head 　
(C) MOER RING JOEDIA 　
(C) ONE BODY CLAMP 　
(C) SHIELD CYLINDER 　
(C) DARK SPACE SHIELD 　
(C) SHIELD DEPOSITION 　
(C) SHIELD SUPPORT 　
(C) SHIELD DARK SPACE 　
(C1) SHIELD DARK SPACE 　
(C) SHIELD CHAMBER BOTTOM 　
C) CAP TABLE SHELD 　
DIFFUSION ◎ (C) QUARTZ TUBE 　
BOAT 　
INNER TUBE 　
OUTER TUBE 　
SIC SUSCEPTOR 　
SHOWER HEAD 　
IIP ◎ (C) FIGHT TUBE,AL,IMPLANT 　
강하넷 진단 Report           ◎ : 매우 잘함
   ○ : 잘함
   △ : 보통
　 　               X : 현재 불가능
재질 별 현수준 대표 품목 이 유
CERAMIC ◎ (C2) SHIELD RING T5 　 　
(C) DOME CERAMIC DPS 　 　
(C) Ring Capture 　 　
(C) Ring Focus 　 　
(C) Gas Nozzle,Housing 　 　
(C) Gas Nozzle,Plug  　 　
(C) Ceramic Inner Point 　 　
(C) INERPOSER RING 　 　
(C) WAFER CENTER RING 　 　
(C) HEAD-SHOWER 　 　
(C) SSGD Inner 　 　
(C) SSGD Outer 　 　
(C) Focus Ring 195mm  　 　
(C) Ring High Wall 8" 　 　
(C) Ring Focus ESC 8" 　 　
(C) Single Ring Ceramic 　 　
(C) Ring Confinement  　 　
(C) CERAMIC FILLER RING 　 　
(C) CERAMIC INNER POINT 　 　
(C) Ring Capture 　 　
(C) UPPER DOME 　 　
(C) CERMIC COVER 　 　
(C) COLLER MIN CONTACT 200 　 　
(C) SHIELD 　 　
(C) WAFER LIFT 　 　
(C) PUMPING PLATE 　 　
(C) ISOLATOR CERAMIC PRO 200MM 　 　
(C) CERAMIC PUMPING INSERT TOP 　 　
(C) CERAMIC PUMPING INSERT MID 　 　
(C) CERAMIC PUMPING INSERT BTM 　 　
(C)SHIELD(P-5000) 　 　
(C) CERAMIC FORK ASSY 　 　
(C) MOER RING JOEDIA 　 　
강하넷 진단 Report           ◎ : 매우 잘함
   ○ : 잘함
   △ : 보통
　 　                X : 현재 불가능
재질 별 현수준 대표 품목 대책
AL ◎ (C2) SHIELD RING T5 　
(C) DOME CERAMIC DPS 　
(C) Ring Capture 　
(C) Ring Focus 　
(C) Gas Nozzle,Housing 　
(C) Gas Nozzle,Plug  　
(C) Ceramic Inner Point 　
(C) INERPOSER RING 　
(C) WAFER CENTER RING 　
(C) HEAD-SHOWER 　
(C) PLATE PERF COMMON 　
(C) PLATE, BLOCKER 　
(C) PLATE WINDOW ITVSERT 　
(C) PRODUCER FACE PLATE 　
(C) BLOCKER 　
(C) GAS BOX EXTENSION 　
(C) Altus Shower Head 　
SHOWER HEAD 　
(C) FIGHT TUBE,AL,IMPLANT 　
○ (C) VRB SHIELD 8" 　
(C) Manifold 　
SUS ◎ (C) ONE BODY CLAMP 　
(C) SHIELD CYLINDER 　
(C) DARK SPACE SHIELD 　
(C) SHIELD DEPOSITION 　
(C) SHIELD SUPPORT 　
(C) SHIELD DARK SPACE 　
(C1) SHIELD DARK SPACE 　
(C) SHIELD CHAMBER BOTTOM 　
C) CAP TABLE SHELD 　
강하넷 진단 Report           ◎ : 매우 잘함
   ○ : 잘함
   △ : 보통
　 　                X : 현재 불가능
재질 별 현수준 대표 품목 대책
ANODIZING ◎ (C) UPPER CHAMBER(메탈) 　 　
(C) Upper Chamber DPS-Poly 　 　
(C) UPPER CHAMBER ASS'Y 　 　
○ (C) MXP+ LINE 　 　
(C) Housing 　 　
(C) LINER, DGDP, CHMBR 　 　
(C) LINER, CATH, MAGNET 　 　
(C) DOOR, SLIT V/V DOOR 　 　
(C) PLATE BAFFLE(CDRM2) 　 　
(C) CAHTODE LINER MXP+ 　 　
(C) MXP+ LINER (WALL LINER) 　 　
(C) MANOMETER WINDOW 　 　
(C) EPD WINDOW 　 　
(C) AL,EXHAUST BAFFLE 　 　
(C) CHUCK AL 　 　
(C) UPPER ELEC, AL6061 　 　
(C) LOWER ELEC, AL6061 　 　
(C) END CAP PLATE 　 　
(C) TGV LOCKING RING 　 　
(C) TGV PENDDLERUM V/V 　 　
강하넷 진단 Report           ◎ : 매우 잘함
   ○ : 잘함
   △ : 보통
　 　                X : 현재 불가능
재질 별 현수준 대표 품목 대책
QUARTZ ◎ (C) Ring Confinement Top 　
(C) Ring Confinement Bottom 　
(C) Ring QUARTZ Upper 　
(C) SHADOW RING QUARTZ 200 　
(C) UNI INSERT GAS QUARTZ 200 　
(C) Quartz Cover Ring 　
(C) QUARTZ TUBE 　
BOAT 　
INNER TUBE 　
OUTER TUBE 　
○ (C) Ring 　
GRAPHITE ◎ SIC SUSCEPTOR 　
○ (C) SUPER BOLTED LOWER 　








 

 

 

www.kangha.net

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