(강하넷)
| 강하넷 | 진단 Report | ◎ : 매우 잘함 | ||
| ○ : 잘함 | ||||
| △ : 보통 | ||||
| X : 현재 불가능 | ||||
| 공정 별 | 현수준 | 대표 품목 | 대책 | |
| CVD | ◎ | (C) PLATE PERF COMMON | ||
| (C) PLATE, BLOCKER | ||||
| (C) UPPER DOME | ||||
| (C) CERMIC COVER | ||||
| (C) COLLER MIN CONTACT 200 | ||||
| (C) SHIELD | ||||
| (C) WAFER LIFT | ||||
| (C) PUMPING PLATE | ||||
| (C) PLATE WINDOW ITVSERT | ||||
| (C) ISOLATOR CERAMIC PRO 200MM | ||||
| (C) CERAMIC PUMPING INSERT TOP | ||||
| (C) PRODUCER FACE PLATE | ||||
| (C) CERAMIC PUMPING INSERT MID | ||||
| (C) CERAMIC PUMPING INSERT BTM | ||||
| (C) BLOCKER | ||||
| (C) GAS BOX EXTENSION | ||||
| (C) Manifold | ||||
| (C)SHIELD(P-5000) | ||||
| (C) CERAMIC FORK ASSY | ||||
| ○ | (C) VRB SHIELD 8" | |||
| 강하넷 | 진단 Report | ◎ : 매우 잘함 | ||
| ○ : 잘함 | ||||
| △ : 보통 | ||||
| X : 현재 불가능 | ||||
| 공정 별 | 현수준 | 대표 품목 | 대책 | |
| METAL | ◎ | (C) Altus Shower Head | ||
| (C) MOER RING JOEDIA | ||||
| (C) ONE BODY CLAMP | ||||
| (C) SHIELD CYLINDER | ||||
| (C) DARK SPACE SHIELD | ||||
| (C) SHIELD DEPOSITION | ||||
| (C) SHIELD SUPPORT | ||||
| (C) SHIELD DARK SPACE | ||||
| (C1) SHIELD DARK SPACE | ||||
| (C) SHIELD CHAMBER BOTTOM | ||||
| C) CAP TABLE SHELD | ||||
| DIFFUSION | ◎ | (C) QUARTZ TUBE | ||
| BOAT | ||||
| INNER TUBE | ||||
| OUTER TUBE | ||||
| SIC SUSCEPTOR | ||||
| SHOWER HEAD | ||||
| IIP | ◎ | (C) FIGHT TUBE,AL,IMPLANT | ||
| 강하넷 | 진단 Report | ◎ : 매우 잘함 | ||
| ○ : 잘함 | ||||
| △ : 보통 | ||||
| X : 현재 불가능 | ||||
| 재질 별 | 현수준 | 대표 품목 | 이 유 | |
| CERAMIC | ◎ | (C2) SHIELD RING T5 | ||
| (C) DOME CERAMIC DPS | ||||
| (C) Ring Capture | ||||
| (C) Ring Focus | ||||
| (C) Gas Nozzle,Housing | ||||
| (C) Gas Nozzle,Plug | ||||
| (C) Ceramic Inner Point | ||||
| (C) INERPOSER RING | ||||
| (C) WAFER CENTER RING | ||||
| (C) HEAD-SHOWER | ||||
| (C) SSGD Inner | ||||
| (C) SSGD Outer | ||||
| (C) Focus Ring 195mm | ||||
| (C) Ring High Wall 8" | ||||
| (C) Ring Focus ESC 8" | ||||
| (C) Single Ring Ceramic | ||||
| (C) Ring Confinement | ||||
| (C) CERAMIC FILLER RING | ||||
| (C) CERAMIC INNER POINT | ||||
| (C) Ring Capture | ||||
| (C) UPPER DOME | ||||
| (C) CERMIC COVER | ||||
| (C) COLLER MIN CONTACT 200 | ||||
| (C) SHIELD | ||||
| (C) WAFER LIFT | ||||
| (C) PUMPING PLATE | ||||
| (C) ISOLATOR CERAMIC PRO 200MM | ||||
| (C) CERAMIC PUMPING INSERT TOP | ||||
| (C) CERAMIC PUMPING INSERT MID | ||||
| (C) CERAMIC PUMPING INSERT BTM | ||||
| (C)SHIELD(P-5000) | ||||
| (C) CERAMIC FORK ASSY | ||||
| (C) MOER RING JOEDIA | ||||
| 강하넷 | 진단 Report | ◎ : 매우 잘함 | ||
| ○ : 잘함 | ||||
| △ : 보통 | ||||
| X : 현재 불가능 | ||||
| 재질 별 | 현수준 | 대표 품목 | 대책 | |
| AL | ◎ | (C2) SHIELD RING T5 | ||
| (C) DOME CERAMIC DPS | ||||
| (C) Ring Capture | ||||
| (C) Ring Focus | ||||
| (C) Gas Nozzle,Housing | ||||
| (C) Gas Nozzle,Plug | ||||
| (C) Ceramic Inner Point | ||||
| (C) INERPOSER RING | ||||
| (C) WAFER CENTER RING | ||||
| (C) HEAD-SHOWER | ||||
| (C) PLATE PERF COMMON | ||||
| (C) PLATE, BLOCKER | ||||
| (C) PLATE WINDOW ITVSERT | ||||
| (C) PRODUCER FACE PLATE | ||||
| (C) BLOCKER | ||||
| (C) GAS BOX EXTENSION | ||||
| (C) Altus Shower Head | ||||
| SHOWER HEAD | ||||
| (C) FIGHT TUBE,AL,IMPLANT | ||||
| ○ | (C) VRB SHIELD 8" | |||
| (C) Manifold | ||||
| SUS | ◎ | (C) ONE BODY CLAMP | ||
| (C) SHIELD CYLINDER | ||||
| (C) DARK SPACE SHIELD | ||||
| (C) SHIELD DEPOSITION | ||||
| (C) SHIELD SUPPORT | ||||
| (C) SHIELD DARK SPACE | ||||
| (C1) SHIELD DARK SPACE | ||||
| (C) SHIELD CHAMBER BOTTOM | ||||
| C) CAP TABLE SHELD | ||||
| 강하넷 | 진단 Report | ◎ : 매우 잘함 | ||
| ○ : 잘함 | ||||
| △ : 보통 | ||||
| X : 현재 불가능 | ||||
| 재질 별 | 현수준 | 대표 품목 | 대책 | |
| ANODIZING | ◎ | (C) UPPER CHAMBER(메탈) | ||
| (C) Upper Chamber DPS-Poly | ||||
| (C) UPPER CHAMBER ASS'Y | ||||
| ○ | (C) MXP+ LINE | |||
| (C) Housing | ||||
| (C) LINER, DGDP, CHMBR | ||||
| (C) LINER, CATH, MAGNET | ||||
| (C) DOOR, SLIT V/V DOOR | ||||
| (C) PLATE BAFFLE(CDRM2) | ||||
| (C) CAHTODE LINER MXP+ | ||||
| (C) MXP+ LINER (WALL LINER) | ||||
| (C) MANOMETER WINDOW | ||||
| (C) EPD WINDOW | ||||
| (C) AL,EXHAUST BAFFLE | ||||
| (C) CHUCK AL | ||||
| (C) UPPER ELEC, AL6061 | ||||
| (C) LOWER ELEC, AL6061 | ||||
| (C) END CAP PLATE | ||||
| (C) TGV LOCKING RING | ||||
| (C) TGV PENDDLERUM V/V | ||||
| 강하넷 | 진단 Report | ◎ : 매우 잘함 | ||
| ○ : 잘함 | ||||
| △ : 보통 | ||||
| X : 현재 불가능 | ||||
| 재질 별 | 현수준 | 대표 품목 | 대책 | |
| QUARTZ | ◎ | (C) Ring Confinement Top | ||
| (C) Ring Confinement Bottom | ||||
| (C) Ring QUARTZ Upper | ||||
| (C) SHADOW RING QUARTZ 200 | ||||
| (C) UNI INSERT GAS QUARTZ 200 | ||||
| (C) Quartz Cover Ring | ||||
| (C) QUARTZ TUBE | ||||
| BOAT | ||||
| INNER TUBE | ||||
| OUTER TUBE | ||||
| ○ | (C) Ring | |||
| GRAPHITE | ◎ | SIC SUSCEPTOR | ||
| ○ | (C) SUPER BOLTED LOWER | |||
Email : kangha@daum.net
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